Optikos welcomed Peter de Groot, Ph.D., Zygo Executive Director of R&D, during the NES/OSA meeting hosted by the company on May 22nd. Dr. de Groot’s talk engaged the audience as he discussed the challenges associated with performing 3D optical measurements. He explained how the lack of a standardized vernacular led to confusion as to what the lateral resolution and depth resolution actually mean when describing the performance of optically based 3-D profilers. Dr. de Groot further described both his role in and the current status of international standardization efforts to clarify these issues as they relate to the measurement of areal topography.
A renowned expert in his field, Dr. de Groot is a physics Ph.D. with experience in academic and commercial environments, specializing for 26 years in optical instrumentation invention and design; Dr. de Groot heads a Zygo research team focused on the invention and concept demonstration of new optical instrument products and product enhancement. His comment during his talk that, “I’m aware that I’m in the citadel of optical resolution metrology,” was a much-appreciated salute to the Optikos team!
For additional information, consult articles on:
OPN article on lateral resolution
SPIE paper on specifications for 3D instruments
Wikipedia article on the ISO 25178 series of standards