SMI Surface Measurement Instrument

The Optikos SMI Surface Measurement Unit redefines speed and accuracy in non- contact metrology. The SMI is a high-speed surface topography instrument that characterizes spherical, toric, and aspheric surfaces.

The SMI measures surface shape contours of precision surfaces using wavefront sensing technology. Aspheric and toric parts are easily measured without the need for reference surfaces. The SMI compares the wavefront reflected from the surface to that expected from a perfect sphere. The surface deviation is expressed in the form of characteristic circular functions called the Zernike polynomials.

Its small size takes up no more bench space than a second CPU, is operable in any manufacturing environment, and begins measurements at the touch of a button. Simply place the part on the nest, press a button, and the SMI does the rest.

Features

  • Non-contact
  • One-button operation
  • Toric and aspheric measurements
  • Conic constant and shape factor
  • <0.1μm surface map accuracy
  • Multi-zone and masked measurements
  • <3μm radius accuracy
  • Under 10 seconds cycle time
  • Zernike Polynomials
  • Small bench footprint
  • .28 and .42 NA objectives available in standard configuration